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[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls
Buja, Federico, Kokorian, Jaap, Sumant, Anirudha V., van Spengen, W. MerlijnYear:
2014
Language:
english
DOI:
10.1109/nems.2014.6908763
File:
PDF, 478 KB
english, 2014