[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - Eletronical and optical characteristics of atmospheric pressure plasma enhanced chemical vapor deposition (APPECVD) system
Oksuz, Lutfi, Gulec, Ali, Ozaltin, Kadir, Akkaya, Kadir, Erkmen, Gokhan, Uygun, AysegulYear:
2008
Language:
english
DOI:
10.1109/plasma.2008.4590732
File:
PDF, 21 KB
english, 2008