![](/img/cover-not-exists.png)
[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - New technonomics trends and concepts of manufacturing for competitive deep-submicron ULSI and WSI
Bubennikov, A.N., Bubennikov, A.A., Rakitin, V.V.Year:
1997
Language:
english
DOI:
10.1109/issm.1997.664482
File:
PDF, 474 KB
english, 1997