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[IEEE 2009 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Oxnard, CA, USA (2009.03.30-2009.04.2)] 2009 IEEE International Conference on Microelectronic Test Structures - Non-Contact, Pad-less Measurement Technology and Test Structures for Characterization of Cross-Wafer and In-Die Product Variability
Steinbrueck, Gary, Vickers, James S., Babazadeh, Majid, Pelella, Mario M., Pakdaman, NaderYear:
2009
Language:
english
DOI:
10.1109/icmts.2009.4814617
File:
PDF, 653 KB
english, 2009