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[IEEE 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Nara-city, Japan (2007.05.27-2007.05.31)] 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application
Nakaki, Hiroshi, Ikariyama, Rikyu, Kim, Yong Kwan, Yokoyama, Shintaro, Nishida, Ken, Gruverman, Alexei, Streiffer, Stephen, Saito, Keisuke, Funakubo, HiroshiYear:
2007
Language:
english
DOI:
10.1109/isaf.2007.4393301
File:
PDF, 1.85 MB
english, 2007