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[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Silicon-rim-reinforced silicon nitride microscanner with vertical comb actuator and wafer-level vacuum packaging
Jin, Joo-Young, Yoo, Sunghyun, Bae, Jae-Sung, Kim, Yong-KweonYear:
2013
Language:
english
DOI:
10.1109/omn.2013.6659106
File:
PDF, 526 KB
english, 2013