![](/img/cover-not-exists.png)
[IEEE International Electron Devices Meeting. IEDM Technical Digest - Washington, DC, USA (7-10 Dec. 1997)] International Electron Devices Meeting. IEDM Technical Digest - Ultra-thin EBL (encapsulated barrier layer) for ferroelectric capacitor
In Seon park,, Yeong Kwan Kim,, Sang Min Lee,, Ju Hyuck Chung,, Sang Bom Kang,, Chang Soo Park,, Cha Young Yoo,, Sang In Lee,, Moon Yong Lee,Year:
1997
Language:
english
DOI:
10.1109/iedm.1997.650460
File:
PDF, 372 KB
english, 1997