High Q CMOS-compatible microwave inductors using...

IEEE Microwave and Guided Wave Letters 1997 / Feb. Vol. 7; Iss. 2

High Q CMOS-compatible microwave inductors using double-metal interconnection silicon technology

Min Park,, Seonghearn Lee,, Hyun Kyu Yu,, Jin Gun Koo,, Kee Soo Nam,
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Volume:
7
Language:
english
Journal:
IEEE Microwave and Guided Wave Letters
DOI:
10.1109/75.553054
Date:
January, 1997
File:
PDF, 67 KB
english, 1997
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