[IEEE 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Geneva, Switzerland (2007.05.29-2007.06.1)] 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - High Overtone Bulk Acoustic Resonators Based on Thinning Single-crystal Piezoelectric Layers
Gachon, D., Courjon, E., Masson, J., Guichardaz, B., Ballandras, S.Year:
2007
Language:
english
DOI:
10.1109/freq.2007.4319257
File:
PDF, 755 KB
english, 2007