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[IEEE 2006 International Conference on Advanced Semiconductor Devices and Microsystems - Smolenice, Slovakia (2006.10.16-2006.10.18)] 2006 International Conference on Advanced Semiconductor Devices and Microsystems - Design and simulation of humidity micro-sensors structure based on Polymers
Suchanek, Pavel, Husak, MiroslavYear:
2006
Language:
english
DOI:
10.1109/asdam.2006.331186
File:
PDF, 2.71 MB
english, 2006