[IEEE 2010 IEEE CPMT Symposium Japan (Formerly VLSI...

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[IEEE 2010 IEEE CPMT Symposium Japan (Formerly VLSI Packaging Workshop of Japan) - Tokyo, Japan (2010.08.24-2010.08.26)] 2010 IEEE CPMT Symposium Japan - Preparation of ferroelectric capacitor films onto the releasable substrate and its application to nano-transfer method

Ichiki, Masaaki, Iimura, Keita, Hosono, Toshifumi, Kuroki, Keisuke, Tomioka, Fumiaki, Suga, Tadatomo, Maeda, Ryutaro, Itoh, Toshihiro
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Year:
2010
Language:
english
DOI:
10.1109/cpmtsympj.2010.5679658
File:
PDF, 666 KB
english, 2010
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