LOW TEMPERATURE GROWTH OF SPUTTERED ALN FILMS FOR LAYERED...

Integrated Ferroelectrics 2007 / 05 Vol. 91; Iss. 1

LOW TEMPERATURE GROWTH OF SPUTTERED ALN FILMS FOR LAYERED STRUCTURE SAW DEVICES

ASSOUAR, M. B., ELMAZRIA, O., TIUSAN, C., ALNOT, P.
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Volume:
91
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580701320412
Date:
May, 2007
File:
PDF, 2.36 MB
english, 2007
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