[IEEE 30th European Microwave Conference, 2000 - Paris, France (2000.10.4-2000.10.6)] 30th European Microwave Conference, 2000 - RF MEMS: Silicon micro-mechanical capacitive structures
Bazin, G., Gilles, J.P., Crozat, P., Megherbi, SouhilYear:
2000
Language:
english
DOI:
10.1109/euma.2000.338677
File:
PDF, 3.82 MB
english, 2000