[IEEE 2001 IEEE International SOI Conference. Proceedings -...

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[IEEE 2001 IEEE International SOI Conference. Proceedings - Durango, CO, USA (1-4 Oct. 2001)] 2001 IEEE International SOI Conference. Proceedings (Cat. No.01CH37207) - Characterization and simulation of STI isolation for 0.1 μm partially-depleted SOI devices

Fenouillet-Beranger, C., Faynot, O., Tabone, C., Colladant, T., Ferlet, V., Jahan, C., du Port de Pontcharra, J., Lecarval, G., Pelloie, J.L.
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Year:
2001
Language:
english
DOI:
10.1109/soic.2001.957998
File:
PDF, 301 KB
english, 2001
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