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[IEEE 2006 25th International Conference on Microelectronics - Belgrade, Serbia and Montenegro (14-17 May 2006)] 2006 25th International Conference on Microelectronics - Design Parameters Optimization Using Process Variations of the Pull-In Voltage for MEMs
Voicu, R., Tibeica, C., Bazu, M.Year:
2006
Language:
english
DOI:
10.1109/icmel.2006.1650942
File:
PDF, 420 KB
english, 2006