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[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Study of Excimer Laser Electrochemical Etching Silicon
Long, Yuhong., Xiong, Liangcai., Shi, Tielin., Tang, Zirong.Year:
2007
Language:
english
DOI:
10.1109/nems.2007.352243
File:
PDF, 4.90 MB
english, 2007