![](/img/cover-not-exists.png)
[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer
Jinghui Xu,, Weizheng Yuan,, Honglong Chang,, Xianglian Lv,, Yiting Yu,Year:
2008
Language:
english
DOI:
10.1109/nems.2008.4484351
File:
PDF, 5.18 MB
english, 2008