[IEEE 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2012) - Singapore, Singapore (2012.07.2-2012.07.6)] 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Reliability properties comparison for epitaxy and non-epitaxy wafers on DRAM devices
Chen, Yi Heang, Chen, Chih-Wei, Hsiao, MeiyingYear:
2012
Language:
english
DOI:
10.1109/ipfa.2012.6306273
File:
PDF, 482 KB
english, 2012