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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Comparison of Bulge Test and Point Deflection Methods for the Mechanical Characterisation of Submicron Thick Composite Membranes
Martins, P., Delobelle, P., Malhaire, C., Brida, S., Barbier, D.Year:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300147
File:
PDF, 511 KB
english, 2007