[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - High performance and highly stable ultra-thin oxynitride for CMOS applications
Wenjuan Zhu,, Shepard, Joseph, Wei He,, Ray, Asit, Ronsheim, Paul, Schepis, Dominic, Mocuta, Dan, Leobandung, EffendiYear:
2008
Language:
english
DOI:
10.1109/icsict.2008.4734512
File:
PDF, 2.73 MB
english, 2008