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Integrated Long-Range Thermal Bimorph Actuators for Parallelizable Bio-AFM Applications
Henriksson, Jonas, Gullo, Maurizio Rosario, Brugger, JuergenVolume:
13
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2013.2261293
Date:
August, 2013
File:
PDF, 1.46 MB
english, 2013