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Silicon-Supported Membranes for Improved Large-Area and High-Density Micro/Nanostencil Lithography
van den Boogaart, Marc A. F., Doeswijk, Lianne M., Brugger, JrgenVolume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.885981
Date:
December, 2006
File:
PDF, 4.04 MB
english, 2006