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[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode — Bending and torsional
Koh, Kah How, Kobayashi, Takeshi, Lee, ChengkuoYear:
2011
Language:
english
DOI:
10.1109/omems.2011.6031040
File:
PDF, 614 KB
english, 2011