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[IEEE 1991 IEEE International SOI Conference - Vail Valley, CO, USA (1-3 Oct. 1991)] 1991 IEEE International SOI Conference Proceedings - Paramagnetic defect creation and charge trapping in SIMOX films at high and very high dose levels
Devine, R.A.B., Leray, J.L., Margail, J.Year:
1991
Language:
english
DOI:
10.1109/soi.1991.162831
File:
PDF, 133 KB
english, 1991