Trajectory tracking of piezoelectric positioning stages using a dynamic sliding-mode control
Shieh, Hsin-jang, Huang, Po-kaiVolume:
53
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2006.119
Date:
October, 2006
File:
PDF, 1.65 MB
english, 2006