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Microsized Piston-Cylinder Pneumatic and Hydraulic Actuators Fabricated by Lithography
De Volder, M., Ceyssens, F., Reynaerts, D., Puers, R.Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2025998
Date:
October, 2009
File:
PDF, 570 KB
english, 2009