![](/img/cover-not-exists.png)
[IEEE IEEE SENSORS 2002 - Orlando, FL, USA (12-14 June 2002)] Proceedings of IEEE Sensors - Fully CMOS compatible capacitive differential pressure sensors with on-chip programmabilities and temperature compensation
Trieu, H.K., Kordas, N., Mokwa, W.Volume:
2
Year:
2002
Language:
english
DOI:
10.1109/icsens.2002.1037336
File:
PDF, 639 KB
english, 2002