Substrate Materials and Deposition Temperature Dependent...

Journal of The Electrochemical Society 2009 Vol. 156; Iss. 8

Substrate Materials and Deposition Temperature Dependent Growth Characteristics and Photocatalytic Properties of ALD TiO[sub 2] Films

Cheng, Hsyi-En, Hsu, Ching-Ming, Chen, Yi-Chih
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Volume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3138723
File:
PDF, 519 KB
english, 2009
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