[IEEE 2009 IEEE 22nd International Conference on Micro...

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[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Design and Characterisation of a Hydraulic Microactuator Fabricated by Lithography

De Volder, M., Ceyssens, F., Reynaerts, D., Puers, R.
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Year:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805416
File:
PDF, 9.10 MB
english, 2009
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