[IEEE ESSDERC 2007 - 37th European Solid State Device...

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[IEEE ESSDERC 2007 - 37th European Solid State Device Research Conference - Muenchen, Germany (2007.09.11-2007.09.13)] ESSDERC 2007 - 37th European Solid State Device Research Conference - Achieving low VT Ni-FUSI CMOS via lanthanide incorporation in the gate stack

Veloso, A., Yu, H. Y., Lauwers, A., Chang, S. Z., Adelmann, C., Onsia, B., Demand, M., Brus, S., Vrancken, C., Singanamalla, R., Lehnen, P., Kittl, J., Kauerauf, T., Vos, R., O'Sullivan, B. J., Van El
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Year:
2007
Language:
english
DOI:
10.1109/essderc.2007.4430912
File:
PDF, 1.10 MB
english, 2007
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