CO 2 laser-induced bump formation and growth on polystyrene for multi-depth soft lithography molds
Li, Huawei, Fan, Yiqiang, Conchouso, David, Foulds, Ian GVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115037
Date:
November, 2012
File:
PDF, 1.25 MB
english, 2012