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[IEEE Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials - Cape Cod, MA, USA (11-15 May 1997)] Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials - Selective gate recess RIE etching by CHF/sub 3/+BCl/sub 3/ in InAlAs/InGaAs HEMTs
Hung-Chung Kao,, Li-Shyue Lai,, Yi-Jen Chan,Year:
1997
Language:
english
DOI:
10.1109/iciprm.1997.600073
File:
PDF, 244 KB
english, 1997