[IEEE Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials - Cape Cod, MA, USA (11-15 May 1997)] Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials - Selective gate recess RIE etching by CHF/sub 3/+BCl/sub 3/ in InAlAs/InGaAs HEMTs

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