An online test microstructure for thermal conductivity of surface-micromachined polysilicon thin films
Gao-Bin Xu,, Qing-An Huang,Volume:
6
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2006.870169
Date:
April, 2006
File:
PDF, 978 KB
english, 2006