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Effect of Environmental Humidity on Dielectric Charging Effect in RF MEMS Capacitive Switches Based on $C$– $V$ Properties
Wang, Lifeng, Tang, Jie-Ying, Huang, Qing-AnVolume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2237384
Date:
June, 2013
File:
PDF, 1002 KB
english, 2013