Highly Integrable Flow Regulator With Positive Gain

Journal of Microelectromechanical Systems 2011 / 02 Vol. 20; Iss. 1

Highly Integrable Flow Regulator With Positive Gain

Perdigones, Francisco, Luque, Antonio, Ganan-Calvo, Alfonso M., Quero, José M.
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2090509
Date:
February, 2011
File:
PDF, 339 KB
english, 2011
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