[IEEE 6th International Conference on Solid-State and IC...

[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - An effective method to increase sensitivity and stability of the integrated gas sensor with sensing film annealing at higher temperature

Gui-zhen Yan,, Chan, P.C.H., Sin, J.K.O., I-Ming Hsing,, Yang-yuan Wang,

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Volume:

Year:

2001

Language:

english

DOI:

10.1109/icsict.2001.982009

File:

PDF, 287 KB

english, 2001

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