[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Air Gap CV measurement for doping concentration in epitaxial silicon
Heider, Franz, Baumgartl, Johannes, Horvath, Peter, Jaehrling, ThomasYear:
2014
Language:
english
DOI:
10.1109/asmc.2014.6847015
File:
PDF, 471 KB
english, 2014