[IEEE 2004 International Semiconductor Conference. CAS 2004...

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[IEEE 2004 International Semiconductor Conference. CAS 2004 - Sinaia, Romania (4-6 Oct. 2004)] 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748) - Scatterometry, an optical metrology technique for lithography

Logofatu, P.C., Apostol, D., Damian, V., Nascov, V., Garoi, F., Timcu, A., Iordache, I.
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Volume:
2
Year:
2004
Language:
english
DOI:
10.1109/smicnd.2004.1403064
File:
PDF, 243 KB
english, 2004
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