High-Performance Si Nanowire Transistors on Fully Si Bulk...

IEEE Transactions on Nanotechnology 2010 / 01 Vol. 9; Iss. 1

High-Performance Si Nanowire Transistors on Fully Si Bulk Substrate From Top-Down Approach: Simulation and Fabrication

Jing Zhuge,, Yu Tian,, Runsheng Wang,, Ru Huang,, Yiqun Wang,, Baoqin Chen,, Jia Liu,, Xing Zhang,, Yangyuan Wang,
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Volume:
9
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2009.2022537
Date:
January, 2010
File:
PDF, 2.03 MB
english, 2010
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