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[IEEE Proceedings of the IEEE 2004 International Interconnect Technology Conference - Burlingame, CA, USA (7-9 June 2004)] Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729) - Air gap technology by selective ozone/TEOS deposition
Gabric, Z., Pamler, W., Schindler, G., Steinhogl, W., Traving, M.Year:
2004
Language:
english
DOI:
10.1109/iitc.2004.1345723
File:
PDF, 251 KB
english, 2004