Infrared spectroscopic study of the reactions between an...

Japanese Journal of Applied Physics 2015 / 01 Vol. 54; Iss. 1S

Infrared spectroscopic study of the reactions between an octadecyltrichlorosilane self-assembled monolayer and plasma

Shinohara, Masanori, Maruno, Naoki, Yoshida, Yuta, Taniguchi, Yujiro, Ito, Kazuki, Nakano, Yamato, Matsuda, Yoshinobu, Fujiyama, Hiroshi
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.01AB04
Date:
January, 2015
File:
PDF, 1.26 MB
english, 2015
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