![](/img/cover-not-exists.png)
Millimeter-scale actuator with fiber-optic roller bearings
Feinerman, A.D., Thodati, S.R.Volume:
4
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.365367
Date:
March, 1995
File:
PDF, 518 KB
english, 1995