[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Ultra Small Single Walled Carbon Nanotube Pressure Sensors
Helbling, T., Drittenbass, S., Durrer, L., Roman, C., Hierold, C.Year:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805447
File:
PDF, 10.72 MB
english, 2009