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[IEEE 6th Electronics Packaging Technology Conference (EPTC 2004) - Singapore (8-10 Dec. 2004)] Proceedings of 6th Electronics Packaging Technology Conference (EPTC 2004) (IEEE Cat. No.04EX971) - Pressure and depth dependence of sidewall roughness of polymer optical waveguides during reactive ion etching
Pani, S.K., Wong, C.C., Premachandran, C.S., Iyer, M.K., Ramana, P.V., Lim, V., Ranganathan, N.Year:
2004
Language:
english
DOI:
10.1109/eptc.2004.1396638
File:
PDF, 292 KB
english, 2004