[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - First Quantitative Observation of Local Temperature Fluctuation in Millisecond Annealing
Kubo, T., Sukegawa, T., Takii, E., Yamamoto, T., Satoh, S., Kase, M.Year:
2007
Language:
english
DOI:
10.1109/rtp.2007.4383861
File:
PDF, 1.54 MB
english, 2007