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[IEEE 2012 IEEE International Integrated Reliability Workshop (IIRW) - South Lake Tahoe, CA, USA (2012.10.14-2012.10.18)] 2012 IEEE International Integrated Reliability Workshop Final Report - Through silicon via impact on above BEoL Time Dependent Dielectric Breakdown
Frank, T., Chery, E., Chappaz, C., Arnaud, L., Anghel, L.Year:
2012
Language:
english
DOI:
10.1109/iirw.2012.6468916
File:
PDF, 2.65 MB
english, 2012