[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Electrochemical etching used on UHV/CVD epitaxial thin films
Hongyong Jia,, Xiaojun Jin,, Jinshu Zhang,, Peiyi Chen,, Peihsin Tsien,Year:
1998
Language:
english
DOI:
10.1109/icsict.1998.785822
File:
PDF, 385 KB
english, 1998