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[IEEE 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Clearwater, FL, USA (2009.08.17-2009.08.20)] 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Magnetic actuation type low cost polymer MEMS mirror fabricated by photolithography and wet etching processes
Nakano, Tetsuro, Suzuki, Takaaki, Oohira, Fumikazu, Hashiguchi, GenYear:
2009
Language:
english
DOI:
10.1109/omems.2009.5338632
File:
PDF, 341 KB
english, 2009