Influence of Deposition Conditions on Silicon Nanoclusters...

IEEE Transactions on Nanotechnology 2011 / 03 Vol. 10; Iss. 2

Influence of Deposition Conditions on Silicon Nanoclusters in Silicon Nitride Films Grown by Laser-Assisted CVD Method

Tsai, Tai-Cheng, Lou, Li-Ren, Lee, Ching-Ting
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Volume:
10
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2009.2036609
Date:
March, 2011
File:
PDF, 358 KB
english, 2011
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