[IEEE International Electron Devices Meeting. Technical Digest - San Francisco, CA, USA (8-11 Dec. 1996)] International Electron Devices Meeting. Technical Digest - A novel TiN/Ti contact plug technology for gigabit scale DRAM using Ti-PECVD and TiN-LPCVD
Ohto, K., Urabe, K., Taguwa, T., Chikaki, S., Kikkawa, T.Year:
1996
Language:
english
DOI:
10.1109/iedm.1996.553603
File:
PDF, 616 KB
english, 1996